ICCAS OpenIR
Micropatterning of metal films coated on polymer surfaces with epoxy mold and its application to organic field effect transistor fabrication
Wang, Z; Xing, RB; Zhang, J; Yuan, JF; Yu, XH; Han, YC
2004-08-02
Source PublicationAPPLIED PHYSICS LETTERS
ISSN0003-6951
Volume85Issue:5Pages:831-833
AbstractIn this letter, a simple and versatile approach to micropatterning a metal film, which is evaporated on a Si substrate coated with polymer, is demonstrated by the use of a prepatterned epoxy mold. The polymer interlayer between the metal and the Si substrate is found important for the high quality pattern. When the metal-polymer-Si sandwich structure is heated with the temperature below T-m but above T-g of the polymer, the plastic deformation of the polymer film occurs under sufficiently high pressure applied. It causes the metal to crack locally or weaken along the pattern edges. Further heating while applying a lower pressure results in the formation of an intimate junction between the epoxy stamp and the metal film. Under these conditions the epoxy cures further, ensuring adhesion between the stamp and the film. The lift-off process works because the adhesion between the epoxy and the metal film is stronger than that between the metal film and the polymer. A polymer field effect transistor is fabricated in order to demonstrate potential applications of this micropatterning approach. (C) 2004 American Institute of Physics.
DOI10.1063/1.1776325
Indexed BySCI
Language英语
WOS IDWOS:000222969200045
PublisherAMER INST PHYSICS
Citation statistics
Cited Times:15[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/82126
Collection中国科学院化学研究所
Corresponding AuthorWang, Z
AffiliationChinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China
Recommended Citation
GB/T 7714
Wang, Z,Xing, RB,Zhang, J,et al. Micropatterning of metal films coated on polymer surfaces with epoxy mold and its application to organic field effect transistor fabrication[J]. APPLIED PHYSICS LETTERS,2004,85(5):831-833.
APA Wang, Z,Xing, RB,Zhang, J,Yuan, JF,Yu, XH,&Han, YC.(2004).Micropatterning of metal films coated on polymer surfaces with epoxy mold and its application to organic field effect transistor fabrication.APPLIED PHYSICS LETTERS,85(5),831-833.
MLA Wang, Z,et al."Micropatterning of metal films coated on polymer surfaces with epoxy mold and its application to organic field effect transistor fabrication".APPLIED PHYSICS LETTERS 85.5(2004):831-833.
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