ICCAS OpenIR
Embossing of polymers using a thermosetting polymer mold made by soft lithography
Xing, R; Wang, Z; Han, YC
2003-07-01
Source PublicationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN1071-1023
Volume21Issue:4Pages:1318-1322
AbstractIn this article we present a mechanical pattern transfer process where a thermosetting polymer mold instead of a metal, dielectric, ceramic, or semiconductor master made by conventional lithography was used as the master to pattern thermoplastic polymers in hot embossing lithography. The thermosetting polymer mold was fabricated by a soft lithography strategy, microtransfer molding. For comparison, the thermosetting polymer mold and the silicon wafer master were both used to imprint the thermoplastic polymer, polymethylmethacrylate. Replication of the thermosetting polymer mold and the silicon wafer master was of the same quality. This indicates that the thermosetting polymer mold could be used for thermoplastic polymer patterning in hot embossing lithography with high fidelity. (C) 2003 American Vacuum Society.
DOI10.1116/1.1585066
Indexed BySCI
Language英语
WOS IDWOS:000185080000023
PublisherA V S AMER INST PHYSICS
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Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/80420
Collection中国科学院化学研究所
Corresponding AuthorHan, YC
AffiliationChinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China
Recommended Citation
GB/T 7714
Xing, R,Wang, Z,Han, YC. Embossing of polymers using a thermosetting polymer mold made by soft lithography[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2003,21(4):1318-1322.
APA Xing, R,Wang, Z,&Han, YC.(2003).Embossing of polymers using a thermosetting polymer mold made by soft lithography.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,21(4),1318-1322.
MLA Xing, R,et al."Embossing of polymers using a thermosetting polymer mold made by soft lithography".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21.4(2003):1318-1322.
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