ICCAS OpenIR
AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition
Li, MC; Zhao, LC; Cai, W; Liu, D; Chen, XK
2002
Source PublicationJOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
ISSN1005-0302
Volume18Issue:1Pages:24-26
AbstractPtSi ultra-thin films were grown on Si-wafer using pulsed laser deposition (PLD). The surface structure of these films was studied by atomic force microscopy (AFM). In addition, the compositional structure of the PtSi as determined from X-ray photoelectron spectroscopy (XPS) is discussed. First report of a possible growth mechanism is presented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with annealing temperatures and the film thicknesses.
KeywordPtsi Thin Films Pld Afm
Indexed BySCI
Language英语
WOS IDWOS:000173663400008
PublisherJOURNAL MATER SCI TECHNOL
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Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/78532
Collection中国科学院化学研究所
Corresponding AuthorLi, MC
Affiliation1.Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
2.Chinese Acad Sci, Inst Chem, STM Lab, Beijing 100080, Peoples R China
3.Chinese Acad Sci, Lanzhou Inst Phys, Lab Laser Mol Beam Epitaxy, Lanzhou 730000, Peoples R China
Recommended Citation
GB/T 7714
Li, MC,Zhao, LC,Cai, W,et al. AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2002,18(1):24-26.
APA Li, MC,Zhao, LC,Cai, W,Liu, D,&Chen, XK.(2002).AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,18(1),24-26.
MLA Li, MC,et al."AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 18.1(2002):24-26.
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