ICCAS OpenIR
Nanolithographic modification of diamond
Kondo, T; Yanagisawa, M; Jiang, L; Tryk, DA; Fujishima, A
2002-10-01
Source PublicationDIAMOND AND RELATED MATERIALS
ISSN0925-9635
Volume11Issue:10Pages:1788-1796
AbstractElectrical bias-induced nanolithographic modification of the as-deposited surface of boron-doped homoepitaxial diamond films was demonstrated by use of atomic force microscopy in the surface modification (SM) mode and measured in the current mapping (CM) mode. The SM mode involves a higher bias voltage, greater than +2 V, sample vs. gold-coated cantilever tip, than that used for the CM mode. In this way, very small features, e.g. lines 20-30 nm in width, were produced. The main characteristic of these features was extremely low-apparent conductivity. This phenomenon is due principally to a conversion of the hydrogen-terminated, as-deposited surface to an oxygen-terminated surface, thereby increasing the Schottky barrier height significantly. The SM mechanism most likely involves a tip-induced electrochemical oxidation process, i.e. anodization, with water from the humid atmosphere acting as the electrolyte, as in the similar, well-known process on silicon surfaces. (C) 2002 Elsevier Science B.V. All rights reserved.
KeywordHomoepitaxy Diamond Films Atomic Force Microscopy Electrical Properties
Indexed BySCI
Language英语
WOS IDWOS:000178402200009
PublisherELSEVIER SCIENCE SA
Citation statistics
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/78276
Collection中国科学院化学研究所
Corresponding AuthorFujishima, A
Affiliation1.Univ Tokyo, Sch Engn, Dept Appl Chem, Bunkyo Ku, Tokyo 1138656, Japan
2.Chinese Acad Sci, Inst Chem, Mol Sci Res Ctr, Beijing 100080, Peoples R China
Recommended Citation
GB/T 7714
Kondo, T,Yanagisawa, M,Jiang, L,et al. Nanolithographic modification of diamond[J]. DIAMOND AND RELATED MATERIALS,2002,11(10):1788-1796.
APA Kondo, T,Yanagisawa, M,Jiang, L,Tryk, DA,&Fujishima, A.(2002).Nanolithographic modification of diamond.DIAMOND AND RELATED MATERIALS,11(10),1788-1796.
MLA Kondo, T,et al."Nanolithographic modification of diamond".DIAMOND AND RELATED MATERIALS 11.10(2002):1788-1796.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Kondo, T]'s Articles
[Yanagisawa, M]'s Articles
[Jiang, L]'s Articles
Baidu academic
Similar articles in Baidu academic
[Kondo, T]'s Articles
[Yanagisawa, M]'s Articles
[Jiang, L]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Kondo, T]'s Articles
[Yanagisawa, M]'s Articles
[Jiang, L]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.