ICCAS OpenIR
Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders
Shao, LX; Xie, EQ; He, DY; Chen, GH; Xu, K
1998-12-01
Source PublicationJOURNAL OF INORGANIC MATERIALS
ISSN1000-324X
Volume13Issue:6Pages:927-931
AbstractUltradispersed nanodiamond powder synthesized by explosive detonation was used for the pretreatment of mirror Si substrate for nucleation and growth of diamond by microwave plasma-CVD. Compared with the scratching pretreatment, it is found that the pretreatment method by coating substrate with the slurry loading nanodiamond powder not only enhances both of density (up to 10(9) cm(-2)) and nucleation rate, improving the quality of grown-up him greatly, but also controls, nucleation easily. In addition, this pretreatment is also very cost-effective, non-damaging, and reproducible as well.
KeywordCvd Diamond Nucleation Pretreatment Of Substrate Nanodiamond Powder
Indexed BySCI
Language英语
WOS IDWOS:000077808800030
PublisherSCIENCE PRESS
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/74200
Collection中国科学院化学研究所
Corresponding AuthorShao, LX
Affiliation1.Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China
2.Beijing Polytech Univ, Dept Appl Phys, Beijing 100022, Peoples R China
3.Chinese Acad Sci, Inst Chem & Phys, Lanzhou 730000, Peoples R China
Recommended Citation
GB/T 7714
Shao, LX,Xie, EQ,He, DY,et al. Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders[J]. JOURNAL OF INORGANIC MATERIALS,1998,13(6):927-931.
APA Shao, LX,Xie, EQ,He, DY,Chen, GH,&Xu, K.(1998).Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders.JOURNAL OF INORGANIC MATERIALS,13(6),927-931.
MLA Shao, LX,et al."Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders".JOURNAL OF INORGANIC MATERIALS 13.6(1998):927-931.
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