ICCAS OpenIR
Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate
Yu, Xinhong; Wang, Zhe; Yu, Sunyang; Ma, Dongge; Han, Yanchun
2011-09-01
Source PublicationAPPLIED SURFACE SCIENCE
ISSN0169-4332
Volume257Issue:22Pages:9264-9268
AbstractMicropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of OFETs with polymeric dielectric on the flexible substrate was proposed. The desired polymeric semiconductor patterns were fabricated on the flat polydimethylsiloxane (PDMS) surface with a selective lift-off method we proposed previously. The isolated and well defined polymeric semiconductor patterns left on the flat PDMS surface can be further transferred to the gate polymeric dielectric surface by polymer bonding lithography due to the low interfacial energy of PDMS. The transistor fabricated with this 'dry' process has a higher field-effect mobility compared with that using spin coated semiconductor layer. (C) 2011 Elsevier B.V. All rights reserved.
KeywordHot Lift-off Polymer Bonding Lithography
DOI10.1016/j.apsusc.2011.05.006
Indexed BySCI
Language英语
WOS IDWOS:000293590300006
PublisherELSEVIER SCIENCE BV
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/73316
Collection中国科学院化学研究所
Corresponding AuthorHan, Yanchun
AffiliationChinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China
Recommended Citation
GB/T 7714
Yu, Xinhong,Wang, Zhe,Yu, Sunyang,et al. Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate[J]. APPLIED SURFACE SCIENCE,2011,257(22):9264-9268.
APA Yu, Xinhong,Wang, Zhe,Yu, Sunyang,Ma, Dongge,&Han, Yanchun.(2011).Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate.APPLIED SURFACE SCIENCE,257(22),9264-9268.
MLA Yu, Xinhong,et al."Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate".APPLIED SURFACE SCIENCE 257.22(2011):9264-9268.
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