ICCAS OpenIR
Controllable preparation of ultra-low-dielectric nanoporous silica via inorganic-organic hybrid templates
Yang, Ben-hong1,2,3; Xu, Hong-yao1,2; Yang, Zhen-zhong4; Zhang, Chao1,2
2010
Source PublicationJOURNAL OF MATERIALS CHEMISTRY
ISSN0959-9428
Volume20Issue:12Pages:2469-2473
AbstractFour organic-inorganic hybrids were respectively synthesized via hydrosilylative addition reaction between octahydridosilsesquioxane (POSS) and linear dienes with different numbers of methylene groups, and well characterized by FTIR, (13)C NMR and (29)Si NMR technologies. It is confirmed that the hybrids have well-defined three-dimensional network structures with POSS cages uniformly dispersed in the networks. The four hybrids were then used as templates to produce silica films through an optimized spin-coating and calcination process. N(2) sorption-desorption determination reveals that the silica films are nanoporous with a narrow pore distribution. Cross-section HRTEM images of the four films further confirm that the nanosize pores are evenly dispersed. SEM observation shows that the surfaces of the films are smooth and free of cracks or flaws. By altering the number of methylene groups of the dienes linking the POSS cages, pore size and porosity of the porous silica films are easily adjusted. After dehydroxylation treatment with trimethylchlorosilane (TMCS), the porous films show very low dielectric constants, which is closely related to the porosity of the film. This result reveals that the controllable preparation of low dielectric silica films has been achieved in this study.
DOI10.1039/b920893c
Indexed BySCI
Language英语
WOS IDWOS:000275380000027
PublisherROYAL SOC CHEMISTRY
Citation statistics
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/70930
Collection中国科学院化学研究所
Corresponding AuthorXu, Hong-yao
Affiliation1.Donghua Univ, Coll Mat Sci & Engn, Shanghai 201620, Peoples R China
2.Donghua Univ, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China
3.Hefei Univ, Dept Chem & Mat Engn, Hefei 230022, Anhui, Peoples R China
4.Chinese Acad Sci, State Key Lab Polymer Phys & Chem, Inst Chem, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Yang, Ben-hong,Xu, Hong-yao,Yang, Zhen-zhong,et al. Controllable preparation of ultra-low-dielectric nanoporous silica via inorganic-organic hybrid templates[J]. JOURNAL OF MATERIALS CHEMISTRY,2010,20(12):2469-2473.
APA Yang, Ben-hong,Xu, Hong-yao,Yang, Zhen-zhong,&Zhang, Chao.(2010).Controllable preparation of ultra-low-dielectric nanoporous silica via inorganic-organic hybrid templates.JOURNAL OF MATERIALS CHEMISTRY,20(12),2469-2473.
MLA Yang, Ben-hong,et al."Controllable preparation of ultra-low-dielectric nanoporous silica via inorganic-organic hybrid templates".JOURNAL OF MATERIALS CHEMISTRY 20.12(2010):2469-2473.
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