ICCAS OpenIR
Fabrication of a 256-bits organic memory by soft x-ray lithography
Liu Xing-Hua1; Lu Wen-Sheng2; Ji Zhuo-Yu1; Tu De-Yu1; Zhu Xiao-Li1; Xie Chang-Qing1; Liu Ming1
2010-05-01
Source PublicationCHINESE PHYSICS B
ISSN1674-1056
Volume19Issue:5
AbstractThis paper reports a procedure of soft x-ray lithography for the fabrication of an organic crossbar structure. Electron beam lithography is employed to fabricate the mask for soft x-ray lithography, with direct writing technology to the lithograph positive resist and polymethyl methacrylate on the polyimide film. Then Au is electroplated on the polyimide film. Hard contact mode exposure is used in x-ray lithography to transfer the graph from the mask to the wafer. The 256-bits organic memory is achieved with the critical dimension of 250 nm.
KeywordMolecular Memory Crossbar Array Soft X-ray Lithography Electron Beam Lithography
DOI10.1088/1674-1056/19/5/057204
Indexed BySCI
Language英语
WOS IDWOS:000277372200073
PublisherIOP PUBLISHING LTD
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/70566
Collection中国科学院化学研究所
Corresponding AuthorLiu Ming
Affiliation1.Chinese Acad Sci, Microfabricat & Nanotechnol Lab, Inst Microelect, Beijing 100029, Peoples R China
2.Chinese Acad Sci, Key Lab Colloid & Interface Sci, Ctr Mol Sci, Inst Chem, Beijing 100080, Peoples R China
Recommended Citation
GB/T 7714
Liu Xing-Hua,Lu Wen-Sheng,Ji Zhuo-Yu,et al. Fabrication of a 256-bits organic memory by soft x-ray lithography[J]. CHINESE PHYSICS B,2010,19(5).
APA Liu Xing-Hua.,Lu Wen-Sheng.,Ji Zhuo-Yu.,Tu De-Yu.,Zhu Xiao-Li.,...&Liu Ming.(2010).Fabrication of a 256-bits organic memory by soft x-ray lithography.CHINESE PHYSICS B,19(5).
MLA Liu Xing-Hua,et al."Fabrication of a 256-bits organic memory by soft x-ray lithography".CHINESE PHYSICS B 19.5(2010).
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Liu Xing-Hua]'s Articles
[Lu Wen-Sheng]'s Articles
[Ji Zhuo-Yu]'s Articles
Baidu academic
Similar articles in Baidu academic
[Liu Xing-Hua]'s Articles
[Lu Wen-Sheng]'s Articles
[Ji Zhuo-Yu]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Liu Xing-Hua]'s Articles
[Lu Wen-Sheng]'s Articles
[Ji Zhuo-Yu]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.