ICCAS OpenIR
Plasma-Assisted Approaches in Inorganic Nanostructure Fabrication
Zheng, Jie; Yang, Rong; Xie, Lei; Qu, Jianglan; Liu, Yang; Li, Xingguo
2010-04-06
Source PublicationADVANCED MATERIALS
ISSN0935-9648
Volume22Issue:13Pages:1451-1473
AbstractPlasma is a unique medium for chemical reactions and materials preparations, which also finds its application in the current tide of nanostructure fabrication. Although plasma-assisted approaches have been long used in thin-film deposition and the top-down scheme of micro-/nanofabrication, fabrication of zero- and one-dimensional inorganic nanostructures through the bottom-up scheme is a relatively new focus of plasma application. In this article, recent plasma-assisted techniques in inorganic zero- and one-dimensional nanostructure fabrication are reviewed, which includes four categories of plasma-assisted approaches: plasma-enhanced chemical vapor deposition, thermal plasma sintering with liquid/solid feeding, thermal plasma evaporation and condensation, and plasma treatment of solids. The special effects and the advantages of plasmas on nanostructure fabrication are illustrated with examples, emphasizing on the understandings and ideas for controlling the growth, structure, and properties during plasma-assisted fabrications. This Review provides insight into the utilization of the special properties of plasmas in nanostructure fabrication.
DOI10.1002/adma.200903147
Indexed BySCI
Language英语
WOS IDWOS:000276737700003
PublisherWILEY-V C H VERLAG GMBH
Citation statistics
Cited Times:114[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/69282
Collection中国科学院化学研究所
Corresponding AuthorLi, Xingguo
AffiliationPeking Univ, Coll Chem & Mol Engn, State Key Lab Rare Earth Mat Chem & Applicat, Beijing Natl Lab Mol Sci, Beijing 100871, Peoples R China
Recommended Citation
GB/T 7714
Zheng, Jie,Yang, Rong,Xie, Lei,et al. Plasma-Assisted Approaches in Inorganic Nanostructure Fabrication[J]. ADVANCED MATERIALS,2010,22(13):1451-1473.
APA Zheng, Jie,Yang, Rong,Xie, Lei,Qu, Jianglan,Liu, Yang,&Li, Xingguo.(2010).Plasma-Assisted Approaches in Inorganic Nanostructure Fabrication.ADVANCED MATERIALS,22(13),1451-1473.
MLA Zheng, Jie,et al."Plasma-Assisted Approaches in Inorganic Nanostructure Fabrication".ADVANCED MATERIALS 22.13(2010):1451-1473.
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