ICCAS OpenIR
Undercut structures fabricated by microtransfer printing combined with UV exposure and their applications
Xing, Rubo; Xuan, Yu; Wang, Zhe; Ma, Dongge1; Han, Yanchun
2009-07-01
Source PublicationCURRENT APPLIED PHYSICS
ISSN1567-1739
Volume9Issue:4Pages:760-763
AbstractIn this paper. the undercut structures were fabricated by microtransfer printing of metal films on the surface of photoresist combined with UV exposure and photoresist film developing. The patterned metal films were used as mask to realize the selective UV exposure of photoresist Firstly. The undercut structures. which consist of the top metal films and the patterned bottom photoresist, formed in the subsequent developing process because of the lateral dissolving of photoresist at the edge of the unexposed regions. The method proposed in this paper has wider tolerance to the changing of the patterning parameters. but, without effect on patterning resolution since the metal film was used as the top layer. The undercut Structures were Used as separators to pattern passive-matrix display of organic light-emitting diodes (OLEDs). No visible difference of the device performance was observed Compared with the OLEDs patterned by the shadow mask. (c) 2008 Elsevier B.V. All rights reserved.
KeywordPatterning Passive-matrix Display Organic Light-emitting Diodes
DOI10.1016/j.cap.2008.07.005
Indexed BySCI
Language英语
WOS IDWOS:000264737400010
PublisherELSEVIER SCIENCE BV
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/67992
Collection中国科学院化学研究所
Corresponding AuthorMa, Dongge
Affiliation1.Chinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China
2.Chinese Acad Sci, Grad Univ, Changchun 130022, Peoples R China
Recommended Citation
GB/T 7714
Xing, Rubo,Xuan, Yu,Wang, Zhe,et al. Undercut structures fabricated by microtransfer printing combined with UV exposure and their applications[J]. CURRENT APPLIED PHYSICS,2009,9(4):760-763.
APA Xing, Rubo,Xuan, Yu,Wang, Zhe,Ma, Dongge,&Han, Yanchun.(2009).Undercut structures fabricated by microtransfer printing combined with UV exposure and their applications.CURRENT APPLIED PHYSICS,9(4),760-763.
MLA Xing, Rubo,et al."Undercut structures fabricated by microtransfer printing combined with UV exposure and their applications".CURRENT APPLIED PHYSICS 9.4(2009):760-763.
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