ICCAS OpenIR
Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature
Ma, Yanhong1; Liu, Fengzhen1; Zhu, Meifang1; Liu, Jinlong1; Wang, Huan-hua2; Yang, Yi3; Li, Yongfang3
2009-07-08
Source PublicationNANOTECHNOLOGY
ISSN0957-4484
Volume20Issue:27
AbstractAligned amorphous and crystallized silicon nanorods (SiNRs) were successfully fabricated at low temperatures using radio frequency magnetron sputtering and hot wire chemical vapor deposition with glancing angle incident flux. The influences of the deposition pressure, sputtering power, substrate rotation and hydrogen dilution ratio on the diameter, density, orientation and crystallization of the Si nanorods were systematically investigated. With increasing sputtering power, the density of Si nanorods decreases and the diameter of SiNRs increases. The pressure has the opposite effect on the growth of SiNRs compared with the sputtering power. By combining glancing angle deposition ( GLAD) with the hydrogen diluted silane in hot wire chemical vapor deposition (HWCVD), aligned crystallized Si nanorods with a crystalline volume fraction of 0.55 were achieved under a substrate temperature of 140 degrees C. The Si nanorods have been tested for photovoltaic application.
DOI10.1088/0957-4484/20/27/275201
Indexed BySCI
Language英语
WOS IDWOS:000267089600003
PublisherIOP PUBLISHING LTD
Citation statistics
Cited Times:18[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iccas.ac.cn/handle/121111/66768
Collection中国科学院化学研究所
Corresponding AuthorMa, Yanhong
Affiliation1.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
2.Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China
3.Chinese Acad Sci, Inst Chem, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Ma, Yanhong,Liu, Fengzhen,Zhu, Meifang,et al. Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature[J]. NANOTECHNOLOGY,2009,20(27).
APA Ma, Yanhong.,Liu, Fengzhen.,Zhu, Meifang.,Liu, Jinlong.,Wang, Huan-hua.,...&Li, Yongfang.(2009).Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature.NANOTECHNOLOGY,20(27).
MLA Ma, Yanhong,et al."Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature".NANOTECHNOLOGY 20.27(2009).
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