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题名: Directed block copolymer self-assembly implemented via surface-embedded electrets
作者: Wu, Mei-Ling1, 2, 3; Wang, Dong1, 2; Wan, Li-Jun1, 2
刊名: NATURE COMMUNICATIONS
发表日期: 2016-02-01
卷: 7
收录类别: SCI
英文摘要: Block copolymer (BCP) nanolithography is widely recognized as a promising complementary approach to circumvent the feature size limits of conventional photolithography. The directed self-assembly of BCP thin film to form ordered nanostructures with controlled orientation and localized pattern has been the key challenge for practical nanolithography applications. Here we show that BCP nanopatterns can be directed on localized surface electrets defined by electron-beam irradiation to realize diverse features in a simple, effective and non-destructive manner. Charged electrets can generate a built-in electric field in BCP thin film and induce the formation of perpendicularly oriented microdomain of BCP film. The electret-directed orientation control of BCP film can be either integrated with mask-based patterning technique or realized by electron-beam direct-writing method to fabricate microscale arbitrary lateral patterns down to single BCP cylinder nanopattern. The electret-directed BCP self-assembly could provide an alternative means for BCP-based nanolithography, with high resolution.
语种: 英语
内容类型: 期刊论文
URI标识: http://ir.iccas.ac.cn/handle/121111/35844
Appears in Collections:分子纳米结构与纳米技术实验室_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Chem, Key Lab Mol Nanostruct & Nanotechnol, Beijing 100190, Peoples R China
2.Beijing Natl Lab Mol Sci, Beijing 100190, Peoples R China
3.Univ CAS, Beijing 100049, Peoples R China
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