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题名: Microdomain orientation control of PS-b-PMMA films enabled by wettability relay of graphene
作者: Wu, Mei-Ling1, 2, 3; Wang, Dong1, 2
刊名: RSC ADVANCES
发表日期: 2016
卷: 6, 期:9, 页:7527-7531
收录类别: SCI
英文摘要: Orientation control of block copolymer (BCP) microdomains in thin films is an important step for robust pattern transfer in BCP-based nanolithography. The established orientation control of BCP films relies on neutral surface modification using a random copolymer brush covalently bonded to substrates with proper anchoring groups, which is limited to specific substrates. Herein, we reported the utilization ofmonolayer graphene to physically separate a neutral random copolymer layer and a BCP film, and at the same time, relay the wettability of the neutral interface to achieve a perpendicularly oriented control of self-assembly of PS-b-PMMA microdomains. We demonstrate that the method is widely applicable to achieve the orientation control of the BCP film on various substrates.
语种: 英语
内容类型: 期刊论文
URI标识: http://ir.iccas.ac.cn/handle/121111/35797
Appears in Collections:分子纳米结构与纳米技术实验室_期刊论文

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作者单位: 1.Chinese Acad Sci, Key Lab Mol Nanostruct & Nanotechnol, Inst Chem, Beijing 100190, Peoples R China
2.Chinese Acad Sci, Beijing Natl Lab Mol Sci, Inst Chem, Beijing 100190, Peoples R China
3.Univ CAS, Beijing 100049, Peoples R China
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